Smart Sampling

Smart Sampling™ is a highly efficient automated method for inline defect sampling of wafer inspection data in conjunction with inline review tools within the semiconductor manufacturing environment. Smart Sampling is an enabling technology that utilizes a company’s manufacturing data to determine which tool type is best suited to review and classify particular defects. It improves utilization of inline review tools and reduces human error involved in the decision-making process.

Allows users to focus review resources on high-impact issues
More tightly balances known issues and easily investigates new ones
Generates multiple samples and sample types for different review toolsets
Automates sampling that is typically done manually
Stores easy-to-use recipes in user-configurable XML files
Defines sampling at a global level or for specific products and inspection processes
Defines multiple sampling rules and filters can be defined per sampling recipe
Restricts defects to be reviewed by the combined use of filter function and sampling functions